The MP100-FPD Thin Film Thickness Measurement system comes standard with an extra large 470 X 370 mm X-Y Stage, which is designed to generate a 3D Graph to show the Thickness distribution. With Two Points De-Skew function it can locate the measurement spot quickly.

The MP100-FPD provides a state-of-the-art function to measure filled cell gap on LCD, Polyimide on ITO, Color Filter CIE Chromaticity, and Color Filter Thickness. MP100-FPD is also able to measure Oxide, Nitride, Photoresist and Polysilicon films. The powerful software algorithms can perform single to Five layers thickness calculations. Special search and fit routines quickly converge the algorithm and variables into an accurate as possible thickness measurement.

The MP100-FPD uses multiple gratings to achieve a wide spectrum range from UV to NIR. The unique video display design provides the operator with an ergonomic view of the sample area thus eliminating tedious viewing through conventional microscope optics. 
  • Wide Wavelength Range Spectrometer
  • Customized Optical Fiber Cables (including UV-VIS Cables)
  • Desktop (Full Size, Small Form Factor, or All-in-One PC.)

  • Microspot Attachment
  • Ergonomic View Screen Camera
  • Simple Operation
  • Versatile
  • Expandable
  • Fully Programmable Repeatability
  • Large Surface Area Stage
  • Pattern Recognition
Scanning Range:
380nm to 950nm

Spectrum Resolution:
2 nm
​
Precision:
0.2 nm
​
Measurement Speed:
2 seconds per Measurement

Measurement Spot Size:
50 microns at 5X Magnification
25 microns at 10X Magnification
12 microns at 20X Magnification
5 microns at 40X Magnification
  • Laptop Computer
  • Ocean Optics Spectrometer, Visible to NIR
  • Olympus Microscope
  • Microspot Attachment
  • Height Adjustable Post with Base Board
  • Large Programmable XY Motorized Stage
  • Pattern Recognition Module